OPTICAL TECHNOLOGY & NANOMETROLOGY

In-situ

In-situ Phase Modulated Spectroscopic Ellipsometer (1.5-6.5 eV) equipped with Ultra Fast Multi-Wavelength unit for real-time SE measurements for monitoring thin-film growth process.
In-situ Fourier Transform IR Spectroscopic Ellipsometer (0.1-0.5 eV) for monitoring thin-film growth process and polymer plasma treatment.
In-situ Phase Modulated Spectroscopic Ellipsometer (0.7-4.3 eV) for real-time monitoring thin-film growth by Sputtering and HIPIMS processes.

Ex-situ

Ex-situ Phase Modulated Spectroscopic Ellipsometer with Variable Angle (1.5-6.5 eV) in reflection and transmission modes.

In-line

In-line Phase Modulated Spectroscopic Ellipsometer (3-6.5eV) for real-time measurements.

Roll-to-Roll In-line Ellipsometer

OVPD In-line Ellipsometer